Avg Etch Rate
2,847 Ã…/min
+2.1% from last batch
Uniformity
96.2%
Within spec >95%
Wafers Processed
1,247
Last 7 days
Alerts
3
2 process, 1 equipment
Etch Rate Trends
Real-time etch rate monitoring across chambers
Wafer Map Analysis
Etch Rate (Å/min) • W2024-0156
300mm
Scale (Ã…/min)
918579736761
Statistics
Mean:80.0 Ã…
3-sigma:30.0 Ã…
Range:27.0 Ã…
Uniformity:33.8%
Status
Review Required
Chamber Performance
Real-time monitoring of all process chambers
Chamber 1
optimal
Etch Rate
2847 Ã…/min
Uniformity
96.2%
Uptime
98.5%
Uniformity96.2%
Chamber 2
warning
Etch Rate
2756 Ã…/min
Uniformity
92.1%
Uptime
94.2%
Uniformity92.1%
Chamber 3
optimal
Etch Rate
2891 Ã…/min
Uniformity
97.8%
Uptime
99.1%
Uniformity97.8%
Chamber 4
optimal
Etch Rate
2823 Ã…/min
Uniformity
95.4%
Uptime
96.8%
Uniformity95.4%